E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様 Revision:SEMI E154-1110 - Superseded The purpose of this Document

The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment

Method B may also be applied to the examination of the edge contour of the outer periphery of substrates for rigid disks used for magnetic storage of data

SEMI E171-0524 (technical revision)

and to provide literature references where further details can be found

E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様 Revision:SEMI E154-1110 - Superseded The purpose of this DocumentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 450 mm FOUP450 mm MAC (SME) 450 mm FOUP450 mm MACSEMI Referenced SEMI Standards SEMI E63 Specification for 300 mm Box Opener Loader to Tool Standard (BOLTS M) Interface SEMI E110 Guideline for Indicator Placement Zone and Switch