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M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 StdTpc-300 mm Packaging トップハンドリングフランジ

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トップハンドリングフランジ

this Test Method only applies if the laser is Class 1 or Class 2

’ The conditions and procedures are given for determining and expressing the transient characteristics of a MFC to a step change in set point

·    參考標準

M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 StdTpc-300 mm Packaging トップハンドリングフランジglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM198220063 Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M18 Format for Silicon Wafer Specification Form for Order Entry SEMI M24 Specification for Polished Monocrystalline Silicon Premium Wafers

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