E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 The approximate range of generation

The approximate range of generation lifetime that can be measured is 1 µs to 10 ms

3  This Test Method measures the flatness of the front wafer surface as it would appear relative to a specified reference plane when the back surface of the water is ideally flat

SEMI M73-1108 (first published)

manufacturers and end-users of DUV SSISs generally use monodisperse depositions of DUV-stable materials

E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 The approximate range of generationSEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2011620129 SEMI M74450 mm 450 MACMACFOUPFOUPMAC 450mm 450mm 450 mmKCP 3 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E144 Provisional Specification for RF Air