E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded as needed to capture the

as needed to capture the unique data parameters available from each

35-89 (technical revision)

SEMI E80-0299 (first published)

The goal of the Standard is to provide the specifications needed to produce a well-characterized RF power-delivery system

E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded as needed to capture theNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical