E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Revision:SEMI E159-0314 - Superseded The purpose of this Specification

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description

1 GEM is intended to produce economic benefits for both device manufacturers and equipment suppliers

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本書は，ガス供給システムでのメタルシール設計の使用を評価するためのテスト方法である。表面実装タイプのガスシステムおよび従来のメタル面シール継手システムの両者をカバーする。

E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Revision:SEMI E159-0314 - Superseded The purpose of this SpecificationThe purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74. This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without