P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive 3千帕(一大氣壓)以下的製程化學品鋼瓶。

3千帕(一大氣壓)以下的製程化學品鋼瓶。

4  This Guide also describes the different temperature regions of an internal feeder and the temperature limits of the materials used in each region

SEMI F27-0997 (first published)

This Guide provides an overview of the various elements of Tool Accommodation

P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive 3千帕(一大氣壓)以下的製程化學品鋼瓶。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004816North American Regional Standards Committee20049www. semi. org200411 1994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the