MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdPbc-1021 the depolarization effect of color

the depolarization effect of color filters is obtained by measuring the reduction in polarization efficiency when polarized light passes through color filters

the necessity to meet new demands such as single substrate transfer has been increasing

in the matrices of interest

Breakdown strength (see SEMI G75

MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdPbc-1021 the depolarization effect of colorThe purpose of this Guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Ambiguities and uncertainties regarding surface defects may be resolved by reference to this Guide. There is close alignment between this Guide and common specifications used for the purchase of silicon wafers. This Guide contains a compilation of the most commonly observed