D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package Revision:SEMI D88-0325 - Current SEMI S2-0310d (delayed revision)

SEMI S2-0310d (delayed revision)

low-cost mass manufacturing scales in additive

the specimen need not be cut into a special shape

• Description of the specification conventions used

D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package Revision:SEMI D88-0325 - Current SEMI S2-0310d (delayed revision)1 Purpose 1. 1 This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage. 2 Scope 2. 1 This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in