P01200 - SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP) Revision:SEMI P12-0997 - Inactive org in November 2004

org in November 2004

SEMI E142-0820 (technical revision)

The scope is limited to defining the key EQIPs and their linking to process program parameters

4-0698 (first published)

P01200 - SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP) Revision:SEMI P12-0997 - Inactive org in November 2004NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is an ICP plasma emission analysis for determination of iron, zinc, calcium, magnesium, copper, boron, aluminum, chromium, manganese, and nickel in photoresist. The applicable concentration range is 0. 1 to 1