P01300 - SEMI P13 - 原子吸光分光法によるポジティブフォトレジスト中におけるナトリウムとカリウムの測定 Revision:SEMI P13-91 (Reapproved 1104) - Inactive the physical and the software

the physical and the software integration into the equipment should be standardized to avoid efforts for specific installations depending on the equipment and fabrication environment

is defined as having the minimum requirements as outlined in ¶ 7

like chunks

stocker controller architecture

P01300 - SEMI P13 - 原子吸光分光法によるポジティブフォトレジスト中におけるナトリウムとカリウムの測定 Revision:SEMI P13-91 (Reapproved 1104) - Inactive the physical and the softwareNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111991 NOTICE: This Standard or Safety Guideline has an Inactive Status because the