F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications the need to accurately determine

the need to accurately determine roughness of polymer surfaces is important when evaluating fluid handling system components from various sources

This Document defines three orthogonal reference planes as references for carrier dimensions

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originally published in 1988

F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications the need to accurately determineThe purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions. The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature. The