E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Appropriate information is summarized in

Appropriate information is summarized in § 5

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

This Test Method determines the integrated scattering from an angle within 3° from the direction of specular reflection to an angle greater than 45° from the surface normal

A notch ground into the edge of the wafer at a specified orientation provides a positive method for such alignment

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Appropriate information is summarized inThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components