E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles StdTpc-Automation Technology SEMI G18-86 (technical revision)

SEMI G18-86 (technical revision)

This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing compositions or processing that may affect the corrosion performance of the wetted surfaces

originally published in 1982

SEMI D21 — Definitions for Flat Panel Display Masks

E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles StdTpc-Automation Technology SEMI G18-86 (technical revision)This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle, used to ship, transport and store a 6 inch reticle. The EUV Pod consists of an outer pod and a protective inner pod. The EUV Pod is to be used when a conventional reticle carrier does not meet the requirements of EUVL. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and