E08700 - SEMI E87 - 캐리어 관리 사양 StdPbc-0412 org in May 2015

org in May 2015

and improving the use or efficiency of utilities

The assumption of wafer-to-wafer (W2W)

This Document can be used as a Guide for equipment manufacturers during the design and testing of their equipment and by those who either use or produce reticles and other EES items

E08700 - SEMI E87 - 캐리어 관리 사양 StdPbc-0412 org in May 2015Global Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . (coordination), (execution), (completion) . SEMI E15. 1 300 mm . (Document) , (Standard). (Document) : AMHS (vehicles) CarrierID (Carrier) Subordinate Document: SEMI E87. 1 0707 Provisional Specification for SECS II Protocol for Carrier Management (CMS) Referenced SEMI Standards SEMI E15 Specification for Tool