M03800 - SEMI M38 - 鏡面リクレイムシリコンウェーハの仕様 Revision:SEMI M38-0312 - Superseded With growing aspect ratio of

With growing aspect ratio of a wafer (e

This Standard defines a physical/data link layer based on Ethernet

and thus the discrete location(s) may or may not be representative of the entire periphery

It is hereby mentioned that a measured value (for example the mean

M03800 - SEMI M38 - 鏡面リクレイムシリコンウェーハの仕様 Revision:SEMI M38-0312 - Superseded With growing aspect ratio ofglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM1999920063 300 mm 1 Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M8 Specification for Polished Monocrystalline Silicon Test Wafers SEMI M18 Format for Silicon Wafer Specification Form for Order Entry