E05200 - SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers StdPbc-0513 This Standard applies to two-port/two-fastener

This Standard applies to two-port/two-fastener components (except mass flow controllers and mass flow meters)

種々のチューブフィッティング及び又は製造者間で比較評価をするために本法を採用する時，ユーザは評価しようとするチューブとチューブフィッティングを選定する際に，選定した仕様を明確にしておくこと。

Subordinate Standards (included):

1，SEMI M6

E05200 - SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers StdPbc-0513 This Standard applies to two-port/two-fastenerThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at www. semiviews. org and www. semi. org in July 2014; originally published in 1995; previously published December 2013. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI AUX030. To provide a