Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Working Inventory # A-17173

Inventory # A-17173

Part No: 547220

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Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Working Inventory # A-17173Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 Used Working Inventory # A 13132 This Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: 1850 Flange: ISO200, 8" Bore Removed from a Tegal 6500 HRe Dual Frequency Etch Cluster System Sale Details Item Condition: Used Working, 90 Day Warranty