M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdTpc-Process Chemicals - Solvents SEMI G21-0317 (technical revision)

$115.50

Post

Description

SEMI G21-0317 (technical revision)

The purpose of this Document is to provide a baseline for publication of chemical amplified (CA) photoresist parameters

本スタンダードは半自動（PGV）と自動搬送（AGVやOHT）両方に対応する450mmウェーハ用フレームカセットを規定する。手動搬送は想定していない。

the values stated in acceptable metric units are for information only

M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdTpc-Process Chemicals - Solvents SEMI G21-0317 (technical revision)global Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM200311 11 P TP T Referenced SEMI Standards SEMI E35 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment SEMI E89 Guide for Measurement System Analysis (MSA) SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers S EMI M59 Terminology for Silicon Technology

Shipping Notes