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M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded a Terminology Standard for back

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a Terminology Standard for back contact cell and module manufacturing is needed

Part 3 of the Silicon Wafer Specification Format for Order Entry

SEMI F48-0600 (technical revision)

5  This Specification also provides guides for the specification of 300 and 450 mm diameter prime silicon wafers for the 32

M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded a Terminology Standard for back0. 5 mSIMOXSIMOX SOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M22 Specification for Dielectrically Isolated (DI) Wafers

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