Semiconductor devices. Micro-electromechanical devices - Test method of bonding strength between PDMS and glass Ingestion-build-48183 5 Method C: Liquid-liquid partitioning
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Description
5 Method C: Liquid-liquid partitioning with dimethylformamide (DMF) and clean-up on a Florisil1) column
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Semiconductor devices. Micro-electromechanical devices - Test method of bonding strength between PDMS and glass Ingestion-build-48183 5 Method C: Liquid-liquid partitioning1 Scope This part of IEC 62047 describes test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone based rubber, PDMS, is used for building of chip based microfluidic devices fabricated using lithography and replica moulding processes. The problem of bonding strength is mainly for high pressure applications as in the case of certain peristaltic pump designs where an off chip compressed air supply is used to drive the
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