Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis Ingestion-build-51747 Information technology - CDIF transfer

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Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis Ingestion-build-51747 Information technology - CDIF transfer1 Scope This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle resolved XPS, XPS sputter depth profiling, peak shape analysis, and variable photon energy XPS.